Built-in film thickness monitor
FE-3
Accurate multi-layer film thickness measurement which has characteristics of wavelength dependency
Measurement Targets
- Optic film (Hard Coat, AR film, ITO…etc)
- FPD (resist, SOI, SiO2…etc)
Measurement Items
- Film thickness analysis for multi-layer film
Features
- A film thickness measurement system based on the high precision spectral interferometry
- Fast Fourier Transformation (FFT) Method as an analytical algorithm (Patent No: 4834847)
- Variety of measurement optics using optical fiber
- Integratable for a wide variety of manufacturing equipments
- Real time thickness measurement
- Remote control and multi point measurement
- White LED light source - long life and high stability
Film Thickness Measurement Instrument
About the Built-in film thickness monitor
FE-3
Accurate multi-layer film thickness measurement which has characteristics of wavelength dependency
Measurement Items
Film thickness analysis for multi-layer film
Measurement Targets
Optic film
FPD
Specifications
| Type | FE-3/40C | FE-3/200I |
|---|---|---|
| Principle | spectral interferometry | |
| Thickness range(nd) | 20 nm to 40 μm | 3 μm to 200 μm |
| Wavelength range | 430 nm to 650 nm | 900 nm to 1600 nm |
| Accuracy | 0.2 nm* |
- |
| Repeatability | 2.1σ < 0.1 nm |
- |
| Measurement Time | 0.1 s to 10 s | |
| Spot diameter | Approx. φ 1.2 mm | |
| Light source | White LED | Halogen |
| Optical fiber | Type Y optical fiber 1.5 ｍ to 100 m | |
| Dimensions (W × D × H) | 300 × 300 × 150 mm | |
| Weight | Approx. 10 kg | |
| Software | Peak-valley method, FFT analysis, Optimization | |
- * To guaranteed value of VLSI thickness standard(100nm SiO2/Si)
System Configuration
Single point type
- In-plane distribution measurement for SC wafer
- In-plane distribution measurement for glass substrate
Multi point type
- Real-time measurement
- Quality control in flow direction
- Useable for vacuum chamber
Traversing Type
- Real-time measurement
- Quality control in cross direction
Measurement Examples
Film thickness analysis of hard coat
Contact
Please feel free to contact us with any inquiries or requests.
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