Color Filter Spectral Inspection System
LCF series

Ideal for a wide range of inspections throughout FPD manufacturing processes,
including optical-property evaluation of color filters and film-thickness measurement of films on glass substrates.
Measurement Targets
  • R
  • G
  • B
  • ITO
  • PI
  • Principle
  • OC
  • BM
Measurement Items
  • Color Filter Evaluation
  • Thickness Measurement
Features
  • Provides comprehensive inspection capabilities for color filter manufacturing processes, including transmission spectrum measurement, color measurement, concentration measurement, film-thickness measurement, and reflection spectrum measurement.
  • Suitable for a variety of evaluation applications, including optical-property evaluation of color filters and thin-film analysis of films on glass substrates.
  • The autofocus function and automatic pixel alignment capability enable highly accurate measurements and support fully automated inspection through recipe registration.

Spectroscopic Characterization Instrument About the Color Filter Spectral Inspection System LCF series

Ideal for a wide range of inspections throughout FPD manufacturing processes,
including optical-property evaluation of color filters and film-thickness measurement of films on glass substrates.

Measurement Items

Color measure
ment (Transmission spectrum)

Chromaticity
(XYZ, xy, Lab, L*a*b*, u’v’, u*v*)

* Option

Color difference, White balance

Reflectance *

* Option

Density
(OD) *

* Option

Pixel width *

* Option

Auto focus, Auto alignment *

* Option

Film thickness

Film quality analysis(Optical constant - n:Refractive index, k:Extinction coefficient)

Measurement Targets

  • R, G, BITOPIPrincipleOCBM

Specifications


Type LCF series
Sample Size 50 mm x 50 mm to 3,000 mm x 3,000 mm*
Detector Multi-channel spectrophotometer, PMT option
Image Processing CCD camera and monitor
Auto focus, Auto alignment
Sample Stage XY Stage (Automatic and Manual)


* Please contact us for larger sizes

Measurement Examples

R, G, B measurement of color filter

R, G, B measurement of color filter

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