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Application：various examples of zeta potential measurement
5.pH titration on the surface of silicon wafer
Preventing contamination on the wafer surface is one of the most important issues in the semiconductor industry. Therefore, knowing the electrostatic relationship between contaminants and the wafer surface is an effective means to prevent contamination and improve cleaning efficiency.
Here, it can be seen that the wafer surface is negatively charged at a pH range from 3 to 11. Assuming that the pollutant is alumina, it is easy to guess that it is extremely easy to adhere on the wafer surface and difficult to remove it because the wafer surface and alumina have opposite charges each other at a pH range from 3 to 9.
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