Thickness Measurement
Thickness Monitor
Optical Thickness Meter OPTM series | |
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This instrument enables extremely precise analysis of film thickness and optical constants by measuring absolute spectral reflectance of microscopic regions. |
Contact-Free Thickness Meter Emios | |
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This meter pursues user-friendliness in an uncomplicated manner with “one step operation” such as just placing a sample on the tray for quick analysis. This meter aims to streamline the inspection process by easily measuring absolute thickness without a calibration curve, with high precision and with high resolution. Due to our unique optical geometry being designed as compact, this meter carries out non-contact measurement with high precision of even opaque, rough surface and/or flexible samples. |
Line-Scan Thickness Monitor (In-line type) ![]() |
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This in-line monitor can measure film thicknesses across the full-width and full-length of film products during manufacturing. |
Line-Scan Thickness Monitor (Off-line type) | |
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This off-line monitor easily inspects film thickness unevenness ‘mura’ of the entire area of film for use in R&D and sampling inspection of production lines. |
Thickness Monitor FE-300 | |
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A film thickness measurement system based on the high precision spectrophotometry features compact size and affordable price. Every necessary component is built in one body for stable measurement data. Although offered at affordable price, there is no compromise on accuracy and even optical constant analysis is possible. |
Spectrum Ellipsometer FE-5000/5000S | |
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Automatic angle adjusting mechanism in addition to the basic spectrum ellipsometry system enables high accurate film thickness measurement for variety of thicknesses. Detachable retarder and rotating analyzer also widens the scope of choices available to measure as well as improves the measurement accuracy. |
Built-in film thickness monitor FE-3 | |
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Accurate multi-layer film thickness measurement which has characteristics of wavelength dependency |
Si Wafer Thickness Monitor
Si Wafer Thickness Monitoring System SF-3 | |
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Real-time measurement of Si wafer thickness at CMP or BG |