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Three-Dimensional Optical Wave Field Microscope MINUK NEW

MINUK is capable of evaluating transparent foreign substances and defects in the nano-order, obtaining height direction information in a single shot, and making non-destructive, non-contact and non-invasive measurements.
MINUK also allows the rough position around the target to be scanned at high speed, without focusing, to find the required location.

Product

  • Evaluating transparent foreign substances and defects in the nano-order.
  • Obtaining instant depth direction information in single shot.
  • High-speed measurement without focus.
  • Non-destructive, non-contact and non-invasive measurement.    
  • Easy to find the required location by scanning rough position around the target at high-speed, without focus.


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Specification

Specification   

Resolution x,y  691 nm(one shot),488 nm(composition)
Field of view x,y  700×700 μm
Resolution z  10 nm(Retardation)
Digital refocusing range z  ±700 μm
Sample size  100×80×t20 mm
 (when versatile sample holder attached)
Sample stage  Automatic XY stage for fine adjustment
 X:±10 mm Y:±10 mm
 Stage for rough adjustment
 X:129 mm Y:85 mm
Laser  Wavelength 638 nm
 Output 0.39 mW or less, Class1
  (Irradiation strength to the sample)
Demention
(Width×Depth×Height) mm
 Main unit:505(W)×630(D)×439(H)
Weight  41 kg
Power consumption  Main unit:290 VA
 *PC and Accessory not included.

Applications

Visualization and quantification of transparent film surfaces invisible to the naked eye

The nm-order shape information can be obtained in a non-contact, non-destructive and non-invasive manner. Acquiring depth-direction information in a single shot allows to visualize and quantify scratches on the surface of transparent films and the cross-sectional shape of defects that are invisible to the naked eye.


 

 

Observing filler inside transparent film

Fillers inside transparent films can be observed in a single shot, which are invisible to the naked eye. Also, by changing the focus in the depth direction after measurement allows to identify the filler at each depth.

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