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Home > Product:Spectrometry > Material Evaluation > Thickness meters > Line-Scan Thickness Monitor (Off-line type)

Line-Scan Thickness Monitor (Off-line type)

This off-line monitor easily inspects film thickness unevenness ‘mura’ of the entire area of film for use in R&D and sampling inspection of production lines.
Entire area of film can be measured at high speed and with great precision.

Product

Features
  • Inspection of film thickness unevenness ‘mura’ of the entire area of film at high speed and with great precision
  • Original design of both hardware and software
  • As a manufacturer specializing in film thickness measurement, we can provide enriched support
  • High-precision film thickness measurement by spectroscopic metrology (patented)
  • High speed measurement is possible (over 5 million points/minute)

 

Illustrated image of line-scan
Instantaneous analysis of spectral data of up to 250-mm-wide -film to enable full area unevenness 'mura' inspection and thickness measurement

 

Specifications

Measurement item Film thickness(FFT)
Spatial resolution 1mm or finer
Sample size Max. 250 mm width x unlimited length
Wavelength width per element Approx. 0.6 nm
Film thickness range 2 ~ 300 μm
Scan interval 10 msec ~
Equipment size W459 × D609 × H927 mm
Weight Approx. 60 kg

 

Examples

Measurement of PET film thickness

PET film becomes birefringent when stretched. The resulting spectral reflectance will become as shown in the figure. Our unique technology avoids the influence of this birefringence allowing for highly precise measurement.

The resulting spectral reflectance
Our unique technology avoids the influence of this birefringence allowing
 

In the case of 250 mm wide packaging film

In the case of 250 mm wide packaging film

 

Software
 

Related Information

Related Product

Line-Scan Thickness Monitor (In-line type)

Array Spectrometer MCPD-9800

Optical Thickness Meter OPTM series

Thickness Monitor FE-300

Spectrum Ellipsometer FE-5000/5000S

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