Home > Product:Spectrometry > Optical Thickness Meter OPTM series

Optical Thickness Meter OPTM series

This instrument enables extremely precise analysis of film thickness and optical constants by measuring absolute spectral reflectance of microscopic regions.
Non-destructive and non-contact thickness measurement can be carried out on multilayered films and various coating layers including films, wafers, and optical materials.
Measurement speed is as fast as 1 second / point. Software is easy to use even for beginner users analyzing optical constants.

Product

Features
  • All functions necessary for film thickness measurements are integrated in the head
  • Highly accurate absolute reflectance measurement using microspectroscopy (thickness of multilayered film and optical constants)
  • High speed measurement of less than 1 second per point
  • An optical system which makes possible measurement with a wide wavelength range (UV to NIR) using microscopy
  • Safety mechanism with area sensors
  • Easy Analysis Wizard which allows anyone- even untrained operators, to carry out the analysis of optical constants without difficulty
  • Software program includes macro functions for customization of the measurement sequence
  • Various customizations are possible
  • Complex optical constants can also be analyzed
    (multi-point analysis)
  • 300 mm stage available

The measurement sequence can easily be customized depending on the shape and/or the position of the sample.

The measurement sequence can easily be customized depending on the shape and/or the position of the sample.

 

Measurement Items
  • Absolute reflectance measurement
  • Thickness analysis
  • Optical constant analysis (n: refractive index k: extinction coefficient)

Reflectance

 

Specifications

Specifications
Type OPTM-A1 OPTM-A2 OPTM-A3
Wavelength Range 230 nm~800 nm 360 nm~1100 nm 900 nm~1600 nm
Film Thickness
Measurement Range*
1 nm~35 μm 7 nm~49 μm 16 nm~92 μm
Sample Size** Max.200 mm×200 mm×17 mm
Spot Size Φ5、Φ10、Φ20、Φ40

Notes:
 For Automatic XY stage type
 *Values are SiO2 equivalent thickness.
 **Please contact us for consultation concerning the 300 mm stage.

Type Automatic XY
stage type
Fixed frame type Built-in head type
Size (W×D×H) 556×566×618 mm 368×468×491 mm 210×441×474 mm
90×250×190 mm*
Weight 66 kg 38 kg 23 kg
4 kg*
Maximum power
consumption**
500 VA 400 VA

*Power supply unit
**Select voltage at purchase (AC 90 -110 V or 200-240 V)

 

Configuration

Configuration

Configuration(Automatic XY stage)
Automatic XY stage

 

Configuration(Built-in head-type)
Built-in head-type

Related Information

Related Product

Contact-Free Thickness Meter Emios

Thickness Monitor FE-300

Built-in film thickness monitor FE-3

Spectrum Ellipsometer FE-5000/5000S

Page Top