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Optical Thickness Meter OPTM series

This instrument enables extremely precise analysis of film thickness and optical constants by measuring absolute spectral reflectance of microscopic regions.
Non-destructive and non-contact thickness measurement can be carried out on multilayered films and various coating layers including films, wafers, and optical materials.
Measurement speed is as fast as 1 second / point. Software is easy to use even for beginner users analyzing optical constants.


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  • All functions necessary for film thickness measurements are integrated in the head
  • Highly accurate absolute reflectance measurement using microspectroscopy (thickness of multilayered film and optical constants)
  • High speed measurement of less than 1 second per point
  • An optical system which makes possible measurement with a wide wavelength range (UV to NIR) using microscopy
  • Safety mechanism with area sensors
  • Easy Analysis Wizard which allows anyone- even untrained operators, to carry out the analysis of optical constants without difficulty
  • Software program includes macro functions for customization of the measurement sequence
  • Various customizations are possible
  • Complex optical constants can also be analyzed
    (multi-point analysis)
  • 300 mm stage available

The measurement sequence can easily be customized depending on the shape and/or the position of the sample.

The measurement sequence can easily be customized depending on the shape and/or the position of the sample.


Measurement Items
  • Absolute reflectance measurement
  • Thickness analysis
  • Optical constant analysis (n: refractive index k: extinction coefficient)




Wavelength Range 230 nm~800 nm 360 nm~1100 nm 900 nm~1600 nm
Film Thickness
Measurement Range*
1 nm~35 μm 7 nm~49 μm 16 nm~92 μm
Sample Size** Max.200 mm×200 mm×17 mm
Spot Size Φ5、Φ10、Φ20、Φ40

 For Automatic XY stage type
 *Values are SiO2 equivalent thickness.
 **Please contact us for consultation concerning the 300 mm stage.

Type Automatic XY
stage type
Fixed frame type Built-in head type
Size (W×D×H) 556×566×618 mm 368×468×491 mm 210×441×474 mm
90×250×190 mm*
Weight 66 kg 38 kg 23 kg
4 kg*
Maximum power
500 VA 400 VA

*Power supply unit
**Select voltage at purchase (AC 90 -110 V or 200-240 V)




Configuration(Automatic XY stage)
Automatic XY stage


Configuration(Built-in head-type)
Built-in head-type

Related Information

Related Product

Thickness Monitor FE-300

Built-in film thickness monitor FE-3

Spectrum Ellipsometer FE-5000/5000S

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